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US 12,523,543 B2Granted
Device for controlling trapped ions having a temperature sensor
AssigneeInfineon Technologies Austria AG
InventorsMatthias German Dietl, Silke Katharina Auchter, Sebastian Ludwig Habicht, Lina Purwin, Clemens Rössler, Michael Sieberer, Alexander Zesar
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Abstract
A device for controlling trapped ions includes a substrate. An electrode structure is mounted on the substrate. The electrode structure includes DC electrodes and RF electrodes of an ion trap configured to trap ions in a space above the substrate. A temperature sensor is disposed at the substrate and configured to sense temperatures below 50K.
Claims16
A device for controlling trapped ions, the device comprising:
- a substrate;
- an electrode structure mounted on the substrate, the electrode structure comprising DC electrodes and RF electrodes of an ion trap configured to trap ions in a space above the substrate, the electrode structure being formed in a first metal layer;
- and
- a temperature sensor disposed at the substrate and configured to sense temperatures below 50K, the temperature sensor comprising a tortuous metal line,
- wherein the tortuous metal line is formed in:
- the first metal layer, or
- a second metal layer disposed between the first metal layer and the substrate, or
- both the second metal layer and a third metal layer disposed between the second metal layer and the substrate.
5 more elements
A device for controlling trapped ions, the device comprising:
- a substrate;
- an electrode structure mounted on the substrate, the electrode structure comprising DC electrodes and RF electrodes of an ion trap configured to trap ions in a space above the substrate;
- and
- a temperature sensor disposed at the substrate and configured to sense temperatures below 50K,
- wherein the temperature sensor comprises a tortuous metal line,
- wherein the tortuous metal line forms part of a ring line connected to a DC electrode of the ion trap.
3 more elements
Dependencies are inferred from the claim text.