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US 12,522,923 B2Granted
Advanced barrier nickel oxide (BNiO) coating development for process chamber components via ozone treatment
AssigneeApplied Materials, Inc.
InventorsLaksheswar Kalita, Joseph Behnke, David Knapp
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Abstract
Described herein is a chamber component including a metal layer comprising nickel and a barrier layer of nickel oxide over the metal layer. The barrier layer of nickel oxide may be formed by ozone treating the chamber component with air, nitrogen or argon O2, O3 at a temperature from about 25° C. to about 350° C.
Claims8
A method of protecting a chamber component, consisting of:
- forming a metal plating directly on a surface of a body of the chamber component by performing electroless metal plating, wherein the metal plating comprises nickel, and
- subsequently forming a barrier layer directly on the metal plating using a one-step process consisting of performing an ozone treatment on the chamber component by contacting the body of the chamber component with an ozone gas, wherein the barrier layer comprises nickel oxide and mitigates formation of a black film.
A method of protecting a chamber component, consisting of:
- forming a metal plating directly on a surface of a body of the chamber component by performing electroless metal plating, wherein the metal plating comprises nickel, and
- subsequently forming a barrier layer directly on the metal plating using a one-step process consisting of performing an ozone treatment on the chamber component by contacting the body of the chamber component with an ozone gas and at least of air, nitrogen, argon, or O2, wherein the barrier layer comprises nickel oxide and mitigates formation of a black film.
Dependencies are inferred from the claim text.