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US 12,522,732 B2Granted
Amorphous coating
AssigneeSilcotek Corp.
InventorsDavid A. Smith, James B. Mattzela, Paul H. Silvis, Gary A. Barone, Martin E. Higgins
Life of this patent
Estimating the term…
Abstract
Amorphous coatings and coated articles having amorphous coatings are disclosed. The amorphous coating comprises a first layer and a second layer, the first layer being proximal to a metal substate compared to the second layer, the second layer being distal from the metal substrate compared to the first layer. The first layer and the second layer comprise carbon, hydrogen, and silicon. The first layer further comprises oxygen.
Claims20
An article comprising:
- an anti-stiction, wer-resistant chemical vapor deposition coating deposited at a temperature of greater than 200° C., the anti-stiction, wear-resistant chemical vapor deposition coating comprising:
- carbon, hydrogen, oxygen and amorphous silicon;
- wherein the anti-stiction coating has a ratio of the Carbon:
- the Silicon:
- The Oxygen of about 1:2.25:1.75 and the anti-stiction coating has a coefficnent of friction between about 0.58 and about 0.05.
2 more elements
An article comprising:
- an anti-stiction, wear-resistant chemical vapor deposition coating deposited at a temperature of greater than 300° C., the anti-stiction, wear-resistant chemical vapor deposition coating comprising:
- carbon, hydrogen, oxygen and amorphous silicon;
- wherein the article is a piston head, a piston cylinder, tubing, a fitting, a rotary valve, a ball valve, a slide valve, an injector, a piston ring, a sliding o-ring, a cylinder, a regulator, a mixing system, a sampling apparatus, or an analytical system.
Dependencies are inferred from the claim text.