Processing wafer regeneration equipment

Processing water regeneration system comprising:

• a processing apparatus for processing a workpiece by use of processing water, the processing water having been used by the processor apparatus being waste liquid, wherein the waste liquid discharged from a processing apparatus comprises used processing water and silicon swarf;
• a silicon swarf dryer that dries the wet silicon swarf;
• a pipe for delivering waste liquid to a waste liquid treatment apparatus that treats the waste liquid discharged from the processing apparatus, the waste liquid treatment apparatus comprising:
• a first positive electrode and a first negative electrode disposed in a first tank containing the waste liquid discharged from the processing apparatus, the first positive electrode and the first negative electrode for reserving the waste liquid;
• means for removing silicon swarf from the waste liquid and delivering removed wet silicon swarf to the silicon swarf dryer;
• a pipe for delivering after-swarf-removal waste liquid from the first tank to a hydrogen production unit comprising a second positive electrode and a second negative electrode, wherein electric power is supplied to the second positive electrode and the second negative electrode to produce hydrogen from the after-swarf-removal waste liquid comprising used processing water;
• and
• a pipe for delivering hydrogen generated by the hydrogen production unit to a fuel cell that causes a chemical reaction between the hydrogen produced by the hydrogen production unit and oxygen in air to produce electricity and water, and the electricity and water thus produced are utilized in the processing apparatus.

Processing water regeneration system comprising:

• a processing apparatus for processing a workpiece by use of processing water, the processing water having been used by the processor apparatus being waste liquid, wherein the waste liquid discharged from a processing apparatus comprises used processing water and silicon swarf;
• a silicon swarf dryer that dries the wet silicon swarf;
• a waste liquid treatment apparatus communicatively coupled to the processing apparatus and receiving and treating the waste liquid discharged from the processing apparatus, the waste liquid treatment apparatus comprising:
• a first positive electrode and a first negative electrode disposed in a first tank containing the waste liquid discharged from the processing apparatus, the first positive electrode and the first negative electrode for reserving the waste liquid;
• means for removing silicon swarf from the waste liquid and delivering removed wet silicon swarf to the silicon swarf dryer;
• a hydrogen production unit communicatively coupled to the first tank, the hydrogen production unit comprising a second positive electrode and a second negative electrode, wherein electric power is supplied to the second positive electrode and the second negative electrode to produce hydrogen from the after-swarf-removal waste liquid comprising used processing water;
• and
• a fuel cell communicatively coupled to the hydrogen production unit and receiving hydrogen generated by the hydrogen production unit, the fuel cell causes a chemical reaction between the hydrogen produced by the hydrogen production unit and oxygen in air to produce electricity and water, and the electricity and water thus produced are utilized in the processing apparatus.