Manufacturing method of master template and stamp of grating of diffractive optic element, master template and stamp

A manufacturing method of a stamp of a grating of a diffractive optic element, comprising:

• making a master template by:
• depositing, on a hardmask of a substrate of the template, at least one layer of a material through perforations of a plate, cross sectional areas of the perforations depending on locations of the perforations in the plate, and the plate and the substrate being spaced at a non-zero distance from each other;
• causing a height of the at least one layer on the substrate to vary with variation of the cross sectional areas of the perforations;
• forming raised formations on the substrate by removing the at least one layer from areas, which result in lowered formations between the raised formations, while the hardmask protects the substrate and grating layer of the substrate when the at least one layer is removed for forming the lowered formations;
• making a fill factor and a height of the raised formations to be proportional with each other while the raised and lowered formations have a relation with grooves and ridges of the grating, the relation depending on the proportionality;
• and
• making the stamp by:
• replicating the master template M times based on a profile inversing process, where M is an odd number, in response to the fill factor and the height of the raised formations being inversely proportional with each other,
• forming the stamp from the master template in response to the fill factor and the height of the raised formations being directly proportional with each other, or
• replicating the master template N times based on a profile inversing process, where N is an even number, in response to the fill factor and the height of the raised formations being directly proportional with each other.