US 12,521,841 B2 · Pad carrier assembly for horizontal pre-clean module

Abstract

A pad carrier assembly that includes a coupling base and a pad carrier coupled to the coupling base, the coupling base and the pad carrier are configured to support a buffing pad by a mechanical clamping mechanism. Embodiments of the present disclosure will provide a method of supporting a buffing pad in a horizontal pre-clean module. The method includes mechanically clamping or retaining a buffing pad on a peripheral edge of the buffing pad, wherein the coupling base and the pad carrier are coupled and disposed in a horizontal pre-clean module, and supporting the buffing pad and preventing the buffing pad from sagging, by use of one or more pad retaining features.

Claims20

Dependent claims

A pad carrier for use in a polishing or cleaning process, comprising:

a pad carrier assembly that is configured to be coupled to a first end of a pad carrier positioning arm, wherein the pad carrier assembly comprises:
a clamp plate that comprises a clamp body that comprises:
one or more ferromagnetic or paramagnetic material containing elements disposed within the clamp body;
and
a first retaining surface disposed on a first side of the clamp body;
and
a support plate that comprises a support body that comprises:
a second retaining surface disposed on a first side of the support body;
and
a plurality of support plate retaining features,
wherein each support plate retaining feature is configured to receive a pad retaining feature formed in a buffing pad when a lip portion of the buffing pad is positioned between and in contact with the first and second retaining surfaces.

8 more elements

Dependencies are inferred from the claim text.

Pad carrier assembly for horizontal pre-clean module

Life of this patent

Pad carrier assembly for horizontal pre-clean module

Life of this patent

Abstract

Claims20