Polishing pad and preparing method of semiconductor device using the same
AssigneeEnpulse Co., Ltd.
InventorsJang Won Seo, Eun Sun Joeng, Sung Hoon Yun, Jong Wook Yun
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AssigneeEnpulse Co., Ltd.
InventorsJang Won Seo, Eun Sun Joeng, Sung Hoon Yun, Jong Wook Yun
Estimating the term…
The present disclosure is to provide a polishing pad which is capable of providing physical properties corresponding to various polishing purposes for various polishing objects through the subdivided structural design in a thickness direction, and of securing environmental friendliness by applying a recycled or recyclable material to at least some components, in relation to disposal after use, unlike the conventional polishing pad. Specifically, it includes a polishing layer, wherein the polishing layer includes a polishing variable layer having a polishing surface; and a polishing constant layer disposed on a rear surface side of the polishing variable layer opposite to the polishing surface.
A polishing pad comprising:
Dependencies are inferred from the claim text.