Liquid supply unit, and substrate treating apparatus including the same

A liquid supply unit for supplying a treatment liquid to a nozzle that discharges the treatment liquid to a substrate, the liquid supply unit comprising:

• a tank configured to store the treatment liquid;
• a main circulation line configured to supply the treatment liquid from an internal space of the tank to the nozzle or to recover the treatment liquid to the internal space of the tank;
• a supply line connected to the main circulation line and configured to supply the treatment liquid to the nozzle;
• and
• a heater module in the main circulation line and configured to heat the treatment liquid flowing through the main circulation line to a temperature,
• wherein the heater module includes
• a pipe configured to flow the treatment liquid therethrough and made of a quartz material, and
• a heating element on a surface of the pipe,
• wherein the heater module includes a conductor terminal on the surface of the pipe and a terminal block coupled onto the conductor terminal and configured to receive power from an outside, and
• at least a portion of the conductor terminal is in contact with the heating element, and
• wherein the heating element includes a first portion extending in a longitudinal direction of the pipe while being in contact with the surface of the pipe, a second portion extending upwardly from the first portion and including an upper end and a lower end, and a third portion extending in the longitudinal direction of the pipe from the upper end of the second portion,
• the second portion is in contact with one end of the conductor terminal, and
• the third portion is in contact with the surface of the conductor terminal.

An apparatus for treating a substrate, the apparatus comprising:

• a chamber having a processing space;
• a support unit configured to support and rotate the substrate in the processing space;
• a nozzle configured to supply a treatment liquid to the substrate supported by the support unit;
• and
• a liquid supply unit configured to supply the treatment liquid to the nozzle,
• wherein the liquid supply unit includes
• a first tank and a second tank configured to store the treatment liquid,
• a main circulation line configured to connect the first tank and the second tank, the main circulation line configured to supply the treatment liquid to the nozzle or recover the treatment liquid to an internal space of the first tank or an internal space of the second tank, and
• an internal circulation line configured to comment the first tank and the second tank, the internal circulation line configured to heat the treatment liquid contained in the internal space of the first tank or the internal space of the second tank,
• wherein the main circulation line includes a supply line branched from the main circulation line and configured to supply the treatment liquid to the nozzle, and a recovery line branched from the main circulation line and configured to recover the treatment liquid from the nozzle to the first tank or the second tank,
• the internal circulation line includes a lower circulation line connecting a lower wall of the first tank and a lower wall of the second tank, an upper circulation line connecting an upper wall of the first tank and an upper wall of the second tank, and a shared line connecting the lower circulation line and the upper circulation line, and
• a heater module configured to heat the treatment liquid flowing therein to a temperature is in each of the supply line of the main circulation line and the shared line of the internal circulation line, the heater module including
• a pipe configured to flow the treatment liquid therethrough and made of a quartz material,
• a heating element on a surface of the pipe in a printing manner,
• a conductor terminal on the surface of the pipe in a printing manner, at least a portion of the conductor terminal being in contact with the heating element, and
• a terminal block coupled onto the conductor terminal through a conductive adhesive and configured to receive power from an outside,
• wherein at least a portion of the conductor terminal is in contact with the heating element, and
• wherein the heating element includes a first portion extending in a longitudinal direction of the pipe while being in contact with the surface of the pipe, a second portion extending upwardly from the first portion and including an upper end and a lower end, and a third portion extending in the longitudinal direction of the pipe from the upper end of the second portion,
• the second portion is in contact with one end of the conductor terminal, and
• the third portion is in contact with the surface of the conductor terminal.