Abatement device, deposited material removing means, and deposited material removing method
AssigneeEdwards Japan Limited
InventorsKatsunori Takahashi, Masahiro Tanaka, Jinquan Guan
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Abstract
In order to efficiently remove deposited material adhering to the interior of an abatement device, an abatement device is equipped with a deposited material removing means for removing deposited material produced during abatement of exhaust gas. The deposited material removing means includes: a storage unit that stores a liquid; a gas supply unit that supplies pressurized gas to the storage unit; and a valve that sprays a mixed fluid of the liquid stored in the storage unit and the gas supplied by the gas supply unit.
Claims7
An abatement device equipped with a deposited material removing means for removing deposited material produced during abatement of exhaust gas,
- wherein the deposited material removing means comprises:
- a storage unit that stores a liquid;
- a gas supply unit that supplies pressurized gas to the storage unit;
- and
- a valve that sprays a mixed fluid of the liquid stored in the storage unit and the gas supplied by the gas supply unit.
A deposited material removing means, applied to an abatement device for abating exhaust gas, for removing deposited material produced during abatement of exhaust gas,
- wherein the deposited material removing means comprises:
- a storage unit that stores a liquid;
- a gas supply unit that supplies pressurized gas to the storage unit;
- and
- a valve that sprays a mixed fluid of the liquid stored in the storage unit and the gas supplied by the gas supply unit.
A deposited material removing method for removing deposited material produced by an abatement device for abating exhaust gas, the method comprising:
- a first step of storing a liquid;
- a second step of supplying pressurized gas to the liquid stored in the first step;
- and
- a third step of spraying the mixed fluid of the liquid and the gas produced in the second step on the deposited material to remove the deposited material.
Dependencies are inferred from the claim text.