End material recovery apparatus
AssigneeKioxia Corporation
InventorTakafumi Yonezawa
Life of this patent
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Abstract
An end material recovery apparatus includes a plurality of cages each in which an upper portion is opened, the plurality of cages each having at least one surface formed of at least one of a mesh-like surface and a porous surface, the plurality of cages being configured to receive a mixed liquid in which an end material is mixed with a liquid from the upper portion, collect at least a part of the end material in the mixed liquid, and discharge the liquid from the at least one surface; a rotation drive mechanism configured to individually rotate the plurality of cages in a direction in which the upper portion faces downward; and a plurality of recovery containers configured to recover the end material dropped by individually rotating the plurality of cages in the direction in which the upper portion faces downward.
Claims20
In a semiconductor manufacturing system, an end material recovery apparatus comprising:
- a plurality of cages each having an open upper portion, the plurality of cages each having at least one surface formed of at least one of:
- a mesh surface;
- and
- a porous surface;
- the plurality of cages being configured to receive a mixed liquid in which an end material is mixed with a liquid from the open upper portion, collect at least a part of the end material in the mixed liquid, and discharge the liquid through the at least one surface;
- a rotation drive mechanism configured to individually rotate the plurality of cages in a direction in which the open upper portion faces downward;
- and
- a plurality of recovery containers configured to recover the end material dropped by individually rotating the plurality of cages in the direction in which the open upper portion faces downward.
Dependencies are inferred from the claim text.