Thin film transistor and manufacturing method therefor, and display apparatus
AssigneeBoe Technology Group Co., Ltd.
InventorYang Lv
Life of this patent
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AssigneeBoe Technology Group Co., Ltd.
InventorYang Lv
Estimating the term…
A thin film transistor includes a substrate and an active layer having a channel region. The active layer includes a first active pattern and at least one second active pattern. The first active pattern includes a bottom surface, a top surface and at least one side surface. The at least one side surface connects the bottom and top surfaces, and is in contact with the at least one second active pattern. A length direction of each side surface is approximately perpendicular to a length direction of the channel region. A material of at least the top surface of the first active pattern includes a first polysilicon material, and a material of the second active pattern includes a second polysilicon material; and in the length direction of the channel region, an average grain size of the first polysilicon material is greater than an average grain size of the second polysilicon material.
A thin film transistor, comprising:
Dependencies are inferred from the claim text.