Method for forming nanostructure and field effect transistor device on a substrate
AssigneePeking University
InventorsWei Sun, Mengyu Zhao
Life of this patent
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Abstract
A method for forming a nanostructure array and a field effect transistor device on a substrate are provided. The method for forming the nanostructure array includes: providing a template solution comprising template nanostructures; depositing at least one template nanostructure onto the substrate by contacting the template solution with the substrate; and forming on the substrate at least one fixation structure each intersecting with all or a portion of the at least one template nanostructure to fix all or a portion of the at least one template nanostructure on the substrate.
Claims30
A method for forming a nanostructure array on a substrate, comprising:
- providing a template solution comprising template nanostructures;
- depositing at least one template nanostructure onto the substrate by contacting the template solution with the substrate;
- forming on the substrate at least one fixation structure intersecting with all or a portion of the at least one template nanostructure to fix all or the portion of the at least one template nanostructure on the substrate;
- and
- etching the at least one template nanostructure to remove a portion of the at least one template nanostructure or contaminations.
A method for forming a field effect transistor (FET) array on a substrate, comprising:
- providing a template solution containing nucleic acid template nanostructures, wherein the nucleic acid template nanostructures are decorated with at least one nanowire;
- depositing at least one nucleic acid template nanostructure decorated with the at least one nanowire onto the substrate by contacting the template solution with the substrate;
- forming on the substrate at least one fixation structure each intersecting with all or a portion of the at least one nanowire to fix all or the portion of the at least one nanowire on the substrate;
- removing at least a portion of the at least one nucleic acid template nanostructure which is not covered with the at least one fixation structure;
- forming on the substrate a source contact and a drain contact along the at least one nanowire;
- and
- forming a gate structure between the source contact and the drain contact and along the at least one nanowire.
Dependencies are inferred from the claim text.