Sapphire lamp for laser sustained plasma broadband light source
AssigneeKLA Corporation
InventorsSergei Gluchko, Anatoly Shchemelinin, Ilya Bezel, Oleg Khodykin
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AssigneeKLA Corporation
InventorsSergei Gluchko, Anatoly Shchemelinin, Ilya Bezel, Oleg Khodykin
Estimating the term…
A laser-sustained broadband light source is disclosed. The light source may include a gas containment structure for plasma generation. The gas containment structure may include a first portion formed from a first grade of sapphire and a second portion formed from a second grade of sapphire. The first portion is coupled to one or more sections of the second portion of second grade sapphire. The light source may include sapphire-to-sapphire bonding between the first-grade sapphire of the first portion and the second-grade sapphire of the second portion, thereby eliminating metal-to-sapphire brazing and avoiding exposure of metal components to destructive UV and/or VUV light. The light source may include a primary laser pump source configured to direct a primary pump beam into the gas containment structure to sustain a plasma and a light collector element configured to collect broadband light emitted from the plasma.
A laser-sustained broadband light source comprising:
A plasma lamp comprising:
A characterization system comprising:
Dependencies are inferred from the claim text.