Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorYasunobu Hayashi
Life of this patent
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Abstract
An acoustic wave device includes a piezoelectric substrate and an electrode on the piezoelectric substrate and including first and second layers. The first layer includes Al and Cu. The second layer is on a side opposite to a piezoelectric substrate side of the first layer and includes Al. The first layer includes an Al crystal and at least a portion of CuAl2 crystal grains that are provided in a direction orthogonal or substantially orthogonal to a thickness direction of the piezoelectric substrate. In the electrode, the CuAl2 crystal grains do not extend to the main surface of the second layer on a side opposite to a first layer side.
Claims15
An acoustic wave device comprising:
- a piezoelectric substrate;
- and
- an electrode on the piezoelectric substrate;
- wherein
- the electrode includes:
- a first layer including Al and Cu;
- and
- a second layer on a side opposite to a piezoelectric substrate side of the first layer and includes Al;
- the first layer includes an Al crystal and at least a portion of CuAl2 crystal grains that are provided in a direction orthogonal or substantially orthogonal to a thickness direction of the piezoelectric substrate;
- the CuAl2 crystal grains do not extend to a main surface of the second layer on a side opposite to a first layer side in the electrode;
- and
- no CuAl2 crystal grains are exposed from the second layer at the main surface of the second layer.
An acoustic wave device comprising:
- a piezoelectric substrate;
- and
- an electrode on the piezoelectric substrate;
- wherein
- the electrode includes:
- a first layer including Al and Cu;
- and
- a second layer on a side opposite to a piezoelectric substrate side of the first layer and including Cu;
- the first layer includes an Al crystal and CuAl2 crystal grains that are provided in a direction orthogonal or substantially orthogonal to a thickness direction of the piezoelectric substrate;
- the CuAl2 crystal grains do not extend to a main surface of the second layer on a side opposite to a first layer side;
- and
- no CuAl2 crystal grains are exposed from the second layer at the main surface of the second layer.
Dependencies are inferred from the claim text.