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US 12,519,450 B2Granted
Acoustic wave device with interdigital transducer electrode having non-zero tilt angle
AssigneeSkyworks Solutions, Inc.
InventorsYuya Hiramatsu, Gong Bin Tang
Life of this patent
Estimating the term…
Abstract
Acoustic wave device is disclosed. the acoustic wave device can include a piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer. The interdigital transducer electrode having a non-zero tilt angle. The non-zero tilt angle can between 5° to 15°. The interdigital transducer electrode is configured to shift stopband of the acoustic wave device and to reduce a slanted stopband.
Claims20
An acoustic wave device comprising:
- a piezoelectric layer having four sides, with first and second sides that extend in parallel with each other, and third and fourth sides perpendicular to the first and second sides, the third and fourth sides extending in parallel with each other;
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having at least four layers of alternating titanium and aluminum layers with a non-zero tilt angle and a non-zero rotation angle, the interdigital transducer electrode configured to shift a stopband of the acoustic wave device and to reduce a slanted stopband, the interdigital transducer electrode including first and second bus bars that are in parallel with the first and second sides of the piezoelectric layer, at least a first set of fingers electrically connected to a first bus bar and a at least a second set of fingers electrically connected to a second bus bar, the interdigital transducer electrode further including a first region where the first and second sets of fingers do not extend between each other, and a second region where the first and second sets of fingers do extend between each other, the first and second sets of fingers in the second region extending non-parallel with any of the four sides of the piezoelectric layer.
An acoustic wave device comprising:
- a piezoelectric layer having four sides, with first and second sides that extend in parallel with each other, and third and fourth sides perpendicular to the first and second sides, the third and fourth sides extending in parallel with each other;
- a first reflector and a second reflector on the piezoelectric layer;
- an interdigital transducer electrode over the piezoelectric layer and positioned between the first reflector and the second reflector, the interdigital transducer electrode having at least four layers of alternating titanium and aluminum layers with a tilt angle being between 5° to 15°, a non-zero rotation angle, and a pitch of the interdigital transducer electrode being different from a pitch of the first reflector to shift a stopband of the acoustic wave device, a thickness of the interdigital transducer electrode configured to reduce a slanted stopband, the interdigital transducer electrode including at least first and second bus bars that are in parallel with the first and second sides of the piezoelectric layer, a first set of fingers electrically connected to the first bus bar and at least a second set of fingers electrically connected to a second bus bar, the interdigital transducer electrode further including a first region where the first and second sets of fingers do not extend between each other, and a second region where the first and second sets of fingers do extend between each other, the first and second sets of fingers in the second region extending non-parallel with any of the four sides of the piezoelectric layer.
Dependencies are inferred from the claim text.