Integrated circuit device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYa-Ting Chang, Jian-Zhi Huang, Jin-Bin Yang, I-Chih Ni, Chih-I Wu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYa-Ting Chang, Jian-Zhi Huang, Jin-Bin Yang, I-Chih Ni, Chih-I Wu
Estimating the term…
An integrated circuit device includes a substrate, a first transition metal dichalcogenide layer over the substrate, a dielectric layer over the first transition metal dichalcogenide layer, a first gate electrode, and a first source contact and a first drain contact. The first transition metal dichalcogenide layer has a surface roughness greater than 0.5 nm and less than 1 nm. The first gate electrode is over the dielectric layer and a first portion of the first transition metal dichalcogenide layer. The first source contact and the first drain contact are respectively connected with a second portion and a third portion of the first transition metal dichalcogenide layer. The first portion of the first transition metal dichalcogenide layer is between the second and third portions of the first transition metal dichalcogenide layer.
An integrated circuit device, comprising:
An integrated circuit device, comprising:
An integrated circuit device, comprising:
Dependencies are inferred from the claim text.