Composition comprising a siloxane and an alkane for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 NM or below

A non-aqueous composition consisting essentially of

• (a) an organic solvent selected from the group consisting of
• (i) a linear, branched or cyclic C5 to C12 alkane, and
• (ii) a benzene substituted by 1 to 3 C1 to C4 alkyl groups;
• and
• (b) at least one additive of formulae I or II
• wherein
• R1 is H
• R2 is selected from the group consisting of H, C1 to C10 alkyl, C1 to C10 alkoxy, C6 to C10 aryl, and C6 to C10 aroxy,
• R3 is selected from the group consisting of R2,
• R4 is selected from the group consisting of C1 to C10 alkyl, C1 to C10 alkoxy, C6 to C10 aryl, and C6 to C10 aroxy,
• R10, R12 are independently selected from the group consisting of C1 to C10 alkyl and C1 to C10 alkoxy,
• m is 1, 2 or 3, and
• n is 0 or an integer from 1 to 100.