Manufacturing equipment parts quality management system

A non-transitory computer-readable storage medium storing instructions that, when executed by a processing device, cause the processing device to perform operations comprising:

• receiving first data indicative of values of one or more quality parameters describing one or more properties of one or more manufacturing chamber components installed in a manufacturing chamber, wherein the one or more manufacturing chamber components are of a first type of manufacturing chamber component;
• receiving second data indicative of a first value of a first quality parameter of a new manufacturing chamber component, wherein the new manufacturing chamber component is under consideration for installation into the manufacturing chamber, and wherein the new manufacturing chamber component is of a second type of manufacturing chamber component;
• providing the first data and the second data to a physics-based model;
• receiving, from the physics-based model, a predicted performance of the manufacturing chamber in view of the values of the one or more quality parameters of the one or more manufacturing chamber components installed in the manufacturing chamber and the first value of the first quality parameter of the new manufacturing chamber component;
• and
• determining, based on the predicted performance, whether the new manufacturing chamber component is to be installed in the manufacturing chamber.

A method, comprising:

• receiving predicted performance data of a first manufacturing chamber as output from a first physics-based model of the first manufacturing chamber, wherein the output of the first physics-based model is generated in view of a first value of a first quality
• parameter describing one or more properties of a first component of the first manufacturing chamber,
• wherein the first component was installed in the first manufacturing chamber based on the output of a second physics-based model, wherein the output of the second physics-based model is a predicted performance of the first manufacturing chamber in view of the first value and values of one or more quality parameters of one or more components installed in the first manufacturing chamber, wherein the first component is of a first type of manufacturing chamber component and the one or more manufacturing chamber components are of a second type of manufacturing chamber component;
• receiving measured performance data associated with the first manufacturing chamber;
• and
• causing performance of a corrective action in view of the predicted performance data and the measured performance data.