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US 12,517,347 B2Granted
Polygon mirror
AssigneeCorning Incorporated
InventorsVikram Bhatia, Ravikumar Gopalrao Katare, Imran Mukhtar, Sang Ki Park
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Abstract
A polygon mirror that includes a top surface, a bottom surface, and a plurality of reflective surfaces disposed between the top surface and the bottom surface. Each reflective surface of the plurality of reflective surfaces forms an angle θ with an adjacent reflective surface. Additionally, each reflective surface of the polygon mirror has an RMS surface roughness of about 1.5 nm or less.
Claims19
A polygon mirror comprising:
- a top surface and a bottom surface;
- and
- a plurality of reflective surfaces disposed between the top surface and the bottom surface, each reflective surface of the plurality of reflective surfaces forming an angle θ with an adjacent reflective surface,
- wherein each reflective surface has an RMS surface roughness of about 1.5 nm or less, and
- wherein the polygon mirror has a density of less than about 2.7 g/cc.
2 more elements
Dependencies are inferred from the claim text.