Method for manufacturing concave diffraction grating, and optical device
AssigneeHitachi High-Tech Corporation
InventorsTakanori Aono, Yoshisada Ebata, Kenta Yaegashi, Shigeru Matsui
Life of this patent
Estimating the term…
Abstract
Provided is a feature for highly precisely manufacturing a concave diffraction grating that has a uniform diffraction grating pattern. This method for manufacturing a concave diffraction grating includes: preparing a flat diffraction grating that has a lattice groove and that also has an elongated section, a thin-film section, or a low-friction section formed outside of a region for forming a mold for the concave diffraction grating; mounting the flat diffraction grating on a convex substrate and acquiring the mold for the concave diffraction grating; and transferring the lattice groove in the mold to the concave substrate.
Claims7
A method for manufacturing a concave diffraction grating, the method comprising:
- preparing a flat diffraction grating that has a grating groove, and has a stretchable part, a thin film part, or a low-friction part formed outside a region that serves as a die for the concave diffraction grating;
- mounting the flat diffraction grating on a convex substrate to acquire the die for the concave diffraction grating;
- and
- imprinting the grating groove of the die onto a concave substrate;
- wherein the region that serves as a die for the concave diffraction grating has a coefficient of friction smaller than that of a region outside the region that serves as a die for the concave diffraction grating,
- the low-friction part is formed at the end of the flat diffraction grating, and
- when the flat diffraction grating is mounted on the convex substrate, the convex substrate is pressed against the flat diffraction grating, with at least a part of the low friction part fixed.
Dependencies are inferred from the claim text.