Laser device, evaluation method for laser light spectrum, and electronic device manufacturing method

An evaluation method for laser light spectrum, comprising:

• generating a measurement waveform from an interference pattern of laser light output from a laser device connectable to an exposure apparatus;
• calculating a first spectral waveform indicating a relationship between a wavelength and a light intensity using the measurement waveform;
• calculating a representative wavelength included in a wavelength range of the first spectral waveform;
• calculating an evaluation value of the first spectral waveform using a first integration value obtained by integrating, over the wavelength range, a product of a function of a wavelength deviation from the representative wavelength and the light intensity so as to evaluate a spectral line width of the laser light and a shape of the first spectral waveform;
• and
• adjusting the first spectral waveform of the laser light using a comparison result between the evaluation value and a target evaluation value so as to realize a required exposure performance.

An electronic device manufacturing method, comprising:

• generating laser light using a laser device;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the laser device including:
• a spectrometer configured to generate a measurement waveform from an interference pattern of the laser light output from the laser device connectable to the exposure apparatus;
• and
• a processor configured to calculate a first spectral waveform indicating a relationship between a wavelength and a light intensity using the measurement waveform, calculate a representative wavelength included in a wavelength range of the first spectral waveform, and calculate an evaluation value of the first spectral waveform using a first integration value obtained by integrating, over the wavelength range, a product of a function of a wavelength deviation from the representative wavelength and the light intensity.