Laser interferometer
AssigneeSeiko Epson Corporation
InventorTakeshi Shimizu
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AssigneeSeiko Epson Corporation
InventorTakeshi Shimizu
Estimating the term…
A laser interferometer includes a laser light source configured to emit first laser light; an optical modulator that includes a resonator element and is configured to generate second laser light including a modulation signal; a light receiving element configured to receive the second laser light and third laser light including a sample signal; and a calculation unit configured to calculate a displacement of an object to be measured from a light reception signal based on a reference signal, in which the calculation unit includes a preprocessing unit configured to execute a preprocessing of extracting a frequency modulation component from the light reception signal and output a preprocessing signal, a demodulation processing unit configured to mix the preprocessing signal with orthogonal signals to obtain a mixed signal and then execute a demodulation processing of extracting the sample signal from the mixed signal, and an orthogonal signal generation unit configured to generate the orthogonal signals based on a phase of the reference signal and an amplitude of the preprocessing signal.
A laser interferometer comprising:
Dependencies are inferred from the claim text.