Ceramic joined body, electrostatic chuck device, and method for producing ceramic joined body
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorsYukio Miura, Nobuhiro Hidaka, Jun Arikawa, Hironori Kugimoto
Life of this patent
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Abstract
A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; and a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3), a porosity at an interface between the pair of ceramic plates (2, 3) and the insulating layer (5) is 4% or less, and a ratio of an average primary particle diameter of an insulating material which forms the insulating layer (5) to an average primary particle diameter of an insulating material which forms the ceramic plates (2, 3) is more than 1.
Claims10
A ceramic joined body comprising:
- a pair of ceramic plates that include a conductive material and an insulating material, and
- a conductive layer and an insulating layer that are interposed between the pair of ceramic plates,
- wherein the conductive layer is formed of a conductive material and an insulating material,
- the insulating layer is formed of an insulating material,
- a porosity at an interface between the pair of ceramic plates and the insulating layer is 4% or less,
- a ratio of an average primary particle diameter of the insulating material which forms the insulating layer to an average primary particle diameter of the insulating material of the pair of ceramic plates is more than 1, and
- wherein the insulating materials which are included in the conductive layer and the insulating layer consist of aluminum oxide.
Dependencies are inferred from the claim text.