Aluminum nitride structure and method for producing same
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsTatsuro Yoshioka, Natsuki Sato, Naoki Kurizoe, Ryosuke Sawa, Tohru Sekino, Tomoyo Goto
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Abstract
Provided is an aluminum nitride structure that includes a plurality of aluminum nitride particles, wherein aluminum nitride particles that are adjacent are bound to each other through a boehmite phase containing boehmite, and the porosity is 30% or less. Also provided is a method for producing an aluminum nitride structure that includes: obtaining a mixture by mixing an aluminum nitride powder with a solvent containing water; and pressurizing and heating the mixture under conditions of a pressure of 10 to 600 MPa and a temperature of 50 to 300° C.
Claims14
An aluminum nitride structure comprising:
- a plurality of aluminum nitride particles,
- wherein the plurality of aluminum nitride particles that are adjacent are bound to each other through a boehmite phase containing boehmite, the boehmite phase contains boehmite at 80 mol % or more,
- the aluminum nitride particles each having a structure in which a center is an aluminum nitride phase and a surface is the boehmite phase,
- as measured by energy dispersive X-ray spectroscopy, a proportion of nitrogen is higher than that of oxygen in the aluminum nitride phase, and a proportion of nitrogen is lower than that of oxygen in the boehmite phase, and
- the aluminum nitride structure has a porosity of 30% or less.
Dependencies are inferred from the claim text.