Micro vibration body having three-dimensional curved surface shape and method for manufacturing the same

A method for manufacturing a micro vibration body having a three-dimensional curved surface, the method comprising:

• preparing a mold having a recess part;
• arranging a plate-shaped reflow material on the mold so as to cover the recess part with the reflow material, the reflow material having a lower surface facing the recess part, and an upper surface opposite to the lower surface;
• reducing pressure in a space defined by the recess part covered with the reflow material;
• and
• deforming the reflow material by means of the pressure reduced in the recess part, while heating the reflow material on a side adjacent to the upper surface to soften the reflow material, wherein
• the mold has a different heat capacity portion at a part in an inner side wall of the recess part along a depth direction of the recess part, the different heat capacity portion is provided by a material having a heat capacity different from another part of the inner side wall of the recess part of the mold along the depth direction, and
• in the deforming of the reflow material, the mold having the different heat capacity portion is used to generate a temperature gradient i-s-generated on the inner side wall of the recess part along the depth direction in the mold.

A method for manufacturing a micro vibration body having a three-dimensional curved surface, the method comprising:

• preparing a mold having a recess part;
• arranging a plate-shaped reflow material on the mold so as to cover the recess part with the reflow material, the reflow material having a lower surface facing the recess part, and an upper surface opposite to the lower surface;
• reducing pressure in a space defined by the recess part covered with the reflow material;
• and
• deforming the reflow material by means of the pressure reduced in the recess part, while heating the reflow material on a side adjacent to the upper surface to soften the reflow material,
• wherein
• the deforming of the reflow material includes at least one of heating a part of the mold or cooling a part of the mold,
• the mold has a different heat capacity portion at a part in an inner side wall of the recess part along a depth direction of the recess part, the different heat capacity portion is provided by a material having a heat capacity different from another part of the inner side wall of the recess part of the mold along the depth direction, and
• the at least one of the heating the part of the mold or the cooling the part of the mold is performed to generate a temperature gradient on an inner side wall of the recess part along a depth direction of the recess part.