Imprinting method, pre-processing apparatus, substrate for imprinting, and method for manufacturing substrate

A method for manufacturing a substrate, comprising:

• supplying an imprint material onto a substrate including a shot region;
• bringing a patterned portion of a mold into contact with the imprint material, which has been supplied onto the shot region of the substrate in the supplying of the imprint material, to form a pattern on the imprint material in a predetermined pattern region of the shot region on the substrate;
• increasing a viscosity of the imprint material at a predetermined position in the shot region, the predetermined position including a position of a predetermined mark provided on the substrate and being disposed outside the predetermined pattern region of the shot region, to be higher than a viscosity of the imprint material in the predetermined pattern region of the shot region after the supplying of the imprint material onto the predetermined position in the shot region and before the bringing of the patterned portion of the mold into contact with the imprint material on the shot region;
• hardening the imprint material on the substrate by irradiating the imprint material on the shot region with light with a predetermined wavelength after the bringing of the patterned portion of the mold into contact with the imprint material on the shot region;
• and
• performing posttreatment on the substrate including the imprint material that has been hardened in the hardening of the imprint material.