Back to results
US 12,515,403 B1Granted
Multifunctional deposition nozzle for additive manufacturing
AssigneeATLANT 3D, ApS
InventorsSamir Hassan Mahmoud Ahmed Sadek, Mira Baraket, Maksym Plakhotnyuk
Life of this patent
Estimating the term…
Abstract
The disclosure relates to devices, systems and methods for forming multi-layer films. Specifically, the disclosure relates to devices, systems and methods for forming multi-layered film using a multifunctional nozzle, enabling materials deposition using Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), and Sequential Infiltration Synthesis (SIS), all within the same system.
Claims24
A multifunctional nozzle operable for Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), and Sequential Infiltration Synthesis (SIS), the nozzle comprising:
- a) an upper housing portion having an apical side and a basal side;
- b) a lower housing portion, extending basally from basal side of the upper portion, the lower housing portion having a basal surface, wherein the basal-lower housing potion defining a peripheral wall having a predetermined perimeter cross section extending basally beyond the basal surface;
- c) a precursor inlet port, the precursor inlet port being in fluid communication with:
- i. a precursor reservoir containing a precursor;
- and
- ii. the basal surface of the lower housing portion;
- d) a first exhaust port, or a first vacuum port, the first vacuum port being in fluid communication with:
- i. a first vacuum source;
- and
- ii. the basal surface of the lower housing portion
- e) a reactant inlet port, the reactant inlet port being in fluid communication with:
- i. a reactant reservoir containing a reactant;
- and
- ii. the basal surface of the lower housing portion;
- f) a second exhaust port, or a second vacuum port, the second vacuum port being in fluid communication with:
- i. a second vacuum source;
- and
- ii. the basal surface of the lower housing portion;
- and
- g) an inert gas inlet port, the inert gas inlet port being in fluid communication with:
- i. an inert gas reservoir;
- and
- ii. the basal surface of the lower housing portion.
20 more elements
Dependencies are inferred from the claim text.