Polishing pad with adjusted crosslinking degree and process for preparing the same
AssigneeEnpulse Co., Ltd.
InventorsJong Wook Yun, Eun Sun Joeng, Jang Won Seo
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Abstract
The polishing pad according to an embodiment comprises a multifunctional low-molecular-weight compound as one of the polymerization units of the polyurethane-based resin that constitutes the polishing layer, thereby reducing the unreacted diisocyanate monomer in the production process to enhance the processability and quality and to increase the crosslinking density. Thus, the polishing pad may be applied to a process of preparing a semiconductor device, which comprises a CMP process, to provide a semiconductor device such as a wafer of excellent quality.
Claims5
A polishing pad, which comprises a polishing layer comprising a porous polyurethane-based resin,
- wherein the porous polyurethane-based resin comprises a diisocyanate, a polyol, and a multifunctional low-molecular-weight compound as polymerization units, the multifunctional low-molecular-weight compound has a molecular weight of 500 or less, and the polishing layer has a swelling ratio of 100% to 250% in dimethyl sulfoxide based on the volume or weight of the polishing layer,
- wherein the polishing layer has a hardness of 55 Shore D to 65 Shore D and a tensile strength of 10 N/mm2 to 25 N/mm2,
- wherein the porous polyurethane-based resin is one obtained by curing a urethane-based prepolymer,
- wherein the urethane-based prepolymer comprises the multifunctional low-molecular-weight compound in an amount of 0.1% to 2% by weight based on the weight of the urethane-based prepolymer,
- wherein the urethane-based prepolymer comprises an unreacted diisocyanate in an amount of 0.1% by weight to 5% by weight based on the total weight of the diisocyanate,
- wherein the diisocyanate comprises toluene diisocyanate (TDI),
- wherein the porous polyurethane-based resin further comprises 4,4′-meth-ylenebis(2-chloroaniline) (MOCA) as a curing agent, and a foaming agent, wherein the foaming agent comprises a first foaming agent that is a solid phase foaming agent having a hollow structure and a second foaming agent that is an inert gas foaming agent,
- wherein a polishing rate of the polishing layer is 3,000 Å/1 minute to 5,000 Å/1 minute,
- wherein the solid phase foaming agent is employed in an amount of 0.5 part by weight to 1.5 parts by weight based on 100 parts by weight of the urethane-based prepolymer,
- wherein the urethane-based prepolymer comprises an unreacted NCO group in an amount of 5% by weight to 10% by weight based on the weight of the urethane-based prepolymer,
- wherein the urethane-based prepolymer comprises the diisocyanate, the polyol, and the multifunctional low-molecular-weight compound as polymerization units,
- wherein the weight average molecular weight of the urethane-based prepolymer is 500 to 5,000, and
- wherein the multifunctional low-molecular-weight compound is selected from the group consisting of glycerin, trimethylolpropane, ethylenediamine, diethanolamine, diethylenetriamine, triethylenetetraamine, and dihydrogen monoxide.
Dependencies are inferred from the claim text.