Systems and methods for high speed modulation of a resonant scanner in ophthalmic laser applications

An ophthalmic surgical laser system comprising:

• a laser delivery system for delivering a pulsed laser beam to a cornea in a subject's eye, the pulsed laser beam having a pulse energy and pulse repetition rate;
• a resonant scanner configured to produce a scan line formed by the pulsed laser beam;
• an XY-scan device to deflect the scan line;
• a Z-scan device to modify a depth of a focus of the scan line;
• and
• a controller configured to control the resonant scanner, the XY-scan device and the Z-scan device to form a lenticular incision inside the cornea, including to:
• control the resonant scanner to produce the scan line, the scan line having a scan width;
• and
• control the XY-scan device and the Z-scan device to carry out a sweep of the scan line in a sweep direction, wherein the scan line is tangential to a parallel of latitude of the lenticular incision, wherein the scan line is moved during the sweep along a meridian of longitude of the lenticular incision through an apex of the lenticular incision;
• wherein the scan width is varied during the sweep.