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US 12,512,813 B2Granted
Lateral field excitation acoustic resonator
AssigneeQorvo US, Inc.
InventorsMarc Solal, Robert Aigner
Life of this patent
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Abstract
Lateral field excitation acoustic resonators and methods of manufacture are disclosed. In one aspect, an acoustically resonating material such as a piezoelectric film or membrane is spaced from a substrate by electrodes having an air gap therebetween. When current flows through the electrodes, lateral field acoustic waves are excited in the resonating material with relatively good coupling and adequate heat dissipation.
Claims18
A resonator comprising:
- a piezoelectric membrane for which excitation is done using electrodes at alternate polarities such that:
- the electrodes are placed between the piezoelectric membrane and a substrate and the electrodes delimit an air filled gap therebetween, wherein the electrodes are made of a plurality of layers of metal and wherein each of the plurality of layers of metal comprises a corresponding layer thickness, and a majority of the layer thicknesses are approximately a multiple of a quarter wavelength of a shear acoustic mode in a material around a frequency of the resonator.
A resonator comprising:
- a substrate;
- a reflector positioned on a surface of the substrate;
- electrodes having an air gap therebetween, the electrodes mounted on the reflector;
- and
- a piezoelectric membrane for which excitation is done using the electrodes at alternate polarities, wherein the piezoelectric membrane is positioned on the electrodes opposite the reflector.
2 more elements
Dependencies are inferred from the claim text.