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US 12,512,811 B2Granted
Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsYasunobu Hayashi, Sunao Yamazaki
Life of this patent
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Abstract
An acoustic wave device includes a support substrate, a piezoelectric layer on the support substrate, and a functional element on the piezoelectric layer. The support substrate and the piezoelectric layer each have a rectangular or substantially rectangular shape in plan view from a direction normal to the support substrate. At least one corner portion of the piezoelectric layer has a curved shape or a polygonal shape.
Claims5
An acoustic wave device comprising:
- a support substrate;
- a piezoelectric layer on the support substrate;
- a functional element on the piezoelectric layer;
- and
- an electrode pad on the piezoelectric layer and connected to the functional element;
- wherein
- the support substrate and the piezoelectric layer each have a rectangular or substantially rectangular shape in plan view from a direction normal to the support substrate;
- at least one corner portion of the piezoelectric layer has a curved shape or a polygonal shape;
- and
- a portion of the electrode pad facing the at least one corner portion of the piezoelectric layer has a curved shape or a polygonal shape in plan view from the direction normal to the support substrate.
7 more elements
Dependencies are inferred from the claim text.