Method for controlling high-frequency power supply device, and high-frequency power supply device

A method for controlling a high-frequency power supply device which supplies high frequency power to a load, comprising:

• output control for controlling an output from a high-frequency amplifier, which outputs high frequency power by DC-AC conversion, based on an output command;
• and
• impedance matching control for matching impedances of the high-frequency amplifier and the load, wherein
• the impedance matching control comprises:
• (A) frequency control for changing a control frequency based on a feedback signal of the high-frequency amplifier to match the impedances;
• and
• (B) frequency limit value control for setting a frequency limit value for defining a frequency range of the frequency control,
• (C) the frequency control controlling a frequency of the high-frequency amplifier in the frequency range of the frequency limit value set by the frequency limit value control, wherein the output control comprises:
• (D) output limit value control for setting an output limit value for limiting an output in the frequency range, in which
• (E) an output of the high-frequency amplifier is controlled by an output command value in which the output limit value set by the output limit value control is defined as an upper limit,
• (F) the output control and the impedance matching control being performed separately.

A high-frequency power supply device for supplying high frequency power to a load, comprising:

• a high-frequency amplifier that outputs the high frequency power;
• an output control unit that performs output control on an output of the high-frequency amplifier;
• and
• an impedance matching control unit that matches impedances of the high-frequency amplifier and the load, wherein
• the impedance matching control unit comprises:
• (a) a frequency control section that changes a control frequency by frequency control based on a feedback signal of the high-frequency amplifier;
• and
• (b) a frequency limit value control section that sets a frequency limit value for defining a frequency range in the frequency control, wherein
• the frequency control section is for
• (c) controlling a frequency of the high-frequency amplifier in the frequency range of the frequency limit value set by the frequency limit value control section,
• wherein the output control can freely change a command value of the output command in a plurality of stages during successive control processes.

A high-frequency power supply device for supplying high frequency power to a load, comprising:

• a high-frequency amplifier that outputs the high frequency power;
• an output control unit that performs output control on an output of the high-frequency amplifier;
• and
• an impedance matching control unit that matches impedances of the high-frequency amplifier and the load, wherein
• the impedance matching control unit comprises:
• (a) a frequency control section that changes a control frequency by frequency control based on a feedback signal of the high-frequency amplifier;
• and
• (b) a frequency limit value control section that sets a frequency limit value for defining a frequency range in the frequency control, wherein
• the frequency control section is for
• (c) controlling a frequency of the high-frequency amplifier in the frequency range of the frequency limit value set by the frequency limit value control section, wherein the output control unit comprises
• (d) an output limit value control that sets an output limit value for limiting an output control value of the output control unit in the frequency range, in which
• (e) an output of the high-frequency amplifier is controlled by an output command value in which the output limit value set by the output limit value control is defined as an upper limit,
• the output control unit and the impedance matching control unit performing
• (f) the control separately.