Extreme ultraviolet light generation apparatus and electronic device manufacturing method

An extreme ultraviolet light generation apparatus configured to generate extreme ultraviolet light by irradiating a droplet target with laser light, comprising:

• a first light source configured to output first excitation light;
• a laser oscillator including an active medium and configured to perform laser oscillation by irradiating the active medium with the first excitation light to output the laser light;
• a measurement instrument configured to measure a pulse energy and a pulse time width of the laser light;
• a temperature regulator that adjusts a temperature of a cooling medium that cools the first light source;
• and
• a processor,
• the processor being configured to control the temperature regulator to adjust the temperature of the cooling medium so that the pulse energy measured by the measurement instrument falls within a target range of the pulse energy, and adjust a current value of a current supplied to the first light source so that the pulse time width measured by the measurement instrument falls within a target range of the pulse time width.