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US 12,512,293 B2Granted
Reduction of image drift in a microscopy system
AssigneeFEI Company
InventorsNick Van Gestel, Nick Verwimp, Ruud Krijnen
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AssigneeFEI Company
InventorsNick Van Gestel, Nick Verwimp, Ruud Krijnen
Estimating the term…
The invention relates to a sample holder for a microscopy system comprising a material with a low thermal conductivity for reducing a drift of the sample holder when inserted into a microscope. The invention also relates to a cold trap for a microscopy system comprising a sample holder, wherein the cold trap comprises a coating with a high thermal emissivity to increase a heat load between the sample holder and the cold trap. The invention also relates to a microscopy system comprising a first element configured to have a first temperature, a second element configured to have a second temperature, and a third element configured to have a third temperature, wherein the third element is configured to be located at a plurality of different distances from the first element, wherein the microscopy system is configured to image a sample and to reduce a drift of the image.
A cold trap for a microscopy system, the microscopy system comprising a sample holder and one or more detectors, wherein the cold trap comprises, at least in part, a coating comprising a material with a thermal emissivity between 0.5 and 1 to increase a heat flow between the sample holder and the cold trap, and wherein the cold trap is not in contact with the sample holder, and wherein, when the sample holder and the one or more detectors are positioned within a vacuum chamber of the microscopy system, an outer casing of the cold trap surrounds the sample holder and the one or more detectors.
Dependencies are inferred from the claim text.