Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, pattern forming method, and method for manufacturing electronic device

An actinic ray-sensitive or radiation-sensitive resin composition comprising:

• (A) a resin having a polarity that increases by an action of an acid;
• (B) a photoacid generator;
• (P) an amine oxide;
• and
• (D) an acid diffusion control agent provided that acid diffusion control agents corresponding to the amine oxide are excluded,
• wherein a content of the amine oxide (P) is from 0.01 ppm to 10 ppm with respect to a total mass of the actinic ray-sensitive or radiation-sensitive resin composition,
• a mass ratio of the acid diffusion control agent (D) to the amine oxide (P), represented by the following expression, is more than 1 and 10,000 or less,
• Mass ratio=(Content of acid diffusion control agent (D))/(Content of amine oxide (P)),
• and the amine oxide (P) is selected from the group consisting of a compound represented by General Formula (1), a compound represented by General Formula (2), a compound represented by General Formula (3), a compound represented by General Formula (4), a compound represented by General Formula (5), and a compound represented by General Formula (6),
• wherein in Formula (1), R1, R2, and R3 are each independently a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an alkenyl group, or an aralkyl group, and any two of R1, R2, or R3 may be bonded to each other to form a ring structure,
• wherein in Formula (2), R4, R5, and R6 are each independently a hydrogen atom, an unsubstituted alkyl group, a cycloalkyl group, an aryl group, an alkenyl group, or an aralkyl group, and L1, L2, and L3 each independently represent an unsubstituted alkylene group,
• wherein in Formula (3), R7, Rs, and R9 are each independently a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an alkenyl group, or an aralkyl group, and L4, L5, and L6 each independently represent a divalent linking group,
• wherein in Formula (4), R10 is an alkyl group, a cycloalkyl group, an aryl group, or an alkenyl group, n represents an integer of 0 to 5, and in a case where n represents an integer of 2 or more, a plurality of R10's may be the same as or different from each other,
• wherein in the formula, R1A, R2A, and R3A are each independently an organic group having a heteroatom at a terminal or chain and having 6 or less carbon atoms, and any two of R1A, R2A, or R3A are bonded to each other to form a ring structure, and
• wherein in Formula (6), R1B, R2B, and R3B are each independently an unsubstituted alkyl group, a cycloalkyl group, an aryl group, an alkenyl group, or an aralkyl group, provided that the unsubstituted alkyl group is not an unsubstituted alkyl group having 6 or more carbon atoms, and any two of R1B, R2B, or R3B may be bonded to each other to form a ring structure.