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US 12,510,820 B2Granted
Pellicle membrane, pellicle, membrane, graphene sheet, and method for producing the graphene sheet
AssigneeToppan Inc.
InventorsNaoya Takada, Kazunori Seki, Yutaka Kodera
Life of this patent
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Abstract
A technique that enables production of pellicle membranes that are better resistant to breakage when subjected to force exerted thereon in the thickness direction thereof and that have high transmittance to light. A pellicle membrane of the present invention includes a plurality of laminated layers, where at least one of the layers is provided with at least one hole having a width or diameter of 10 nm to 500 nm.
Claims11
A pellicle membrane, comprising:
- a plurality of laminated layers, each laminated layer of the plurality of laminated layers has a plurality of identical holes, each
- having a width or diameter of 10 nm to 500 nm, wherein the holes of the plurality of laminated layers do not form a through hole extending through each layer of the plurality of the laminated layers.
A pellicle membrane, comprising:
- a plurality of laminated layers, each laminated layer of the plurality of laminated layers has a plurality of identical holes, wherein the holes of the plurality of laminated layers do not form a through hole extending through each layer of the plurality of the laminated layers.
A pellicle membrane, comprising:
- a plurality of laminated layers, each laminated layer of the plurality of laminated layers has a plurality of identical holes, wherein the holes of the plurality of laminated layers do not form a through hole extending through each layer of the plurality of the laminated layers,
- wherein:
- each laminated layer of said plurality comprises a material selected from the group consisting of graphene and carbon nanotube.
Dependencies are inferred from the claim text.