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US 12,510,709 B2Granted
Waveguide structure and method of manufacture
AssigneeSmart Photonics Holding B.V.
InventorAlonso Jesús Millán Mejía
Life of this patent
Estimating the term…
Abstract
A waveguide structure comprising: a substrate; a waveguide layer on the substrate; a cladding layer in contact with a first side of the waveguide layer, the waveguide layer between the cladding layer and the substrate; and a first waveguide modifier layer comprising a first material for modifying a waveguide function of the waveguide layer, the first waveguide modifier layer in contact with the cladding layer and having a width along a first axis less than a width, parallel to the first axis, of the cladding layer, the first axis perpendicular to a second axis corresponding with a light propagation direction within the waveguide layer. There is a method of manufacturing a waveguide structure.
Claims20
A waveguide structure comprising:
- a substrate;
- a waveguide layer on the substrate;
- a cladding layer in contact with a first side of the waveguide layer, the waveguide layer between the cladding layer and the substrate;
- a first waveguide modifier layer comprising a first material for modifying a waveguide function of the waveguide layer, the first waveguide modifier layer in contact with the cladding layer and having a width along a first axis less than a width, parallel to the first axis, of the cladding layer, the first axis perpendicular to a second axis corresponding with a light propagation direction within the waveguide layer;
- and
- a second waveguide modifier layer on the first axis comprising the first material for modifying the waveguide function of the waveguide layer, the first and the second waveguide modifier layers on the first axis in contact with the cladding layer and spaced apart from one another.
3 more elements
A method of manufacturing a waveguide structure, the method comprising:
- depositing a first layer on a substrate to at least partly form a waveguide layer on the substrate;
- depositing a second layer material in contact with the first layer, to at least partly form a cladding layer in contact with the waveguide layer, the waveguide layer between the cladding layer and the substrate;
- and
- depositing a waveguide modifier layer material in contact with the second layer, to at least partly form a first waveguide modifier layer in contact with the cladding layer, the first waveguide modifier layer material for modifying a waveguide function of the waveguide layer, the first waveguide modifier layer having a width along a first axis less than a width, parallel to the first axis, of the cladding layer, the first axis perpendicular to a second axis corresponding with a light propagation direction within the waveguide-layer layer;
- wherein the method comprises
- removing, prior to depositing the waveguide modifier material, one or more portions from the second layer material, the one or more portions of a thickness less than the thickness of the second layer material deposited in contact with the first layer so as not to expose the first layer;
- and
- depositing the waveguide modifier layer material in one or more spaces created by removing the one or more portions.
5 more elements
A waveguide structure comprising:
- a substrate;
- a waveguide layer on the substrate;
- a cladding layer in contact with a first side of the waveguide layer, the waveguide layer between the cladding layer and the substrate;
- a first waveguide modifier layer comprising a first material for modifying a waveguide function of the waveguide layer, the first waveguide modifier layer in contact with the cladding layer and having a width along a first axis less than a width, parallel to the first axis, of the cladding layer, the first axis perpendicular to a second axis corresponding with a light propagation direction within the waveguide layer;
- and
- a further waveguide modifier layer comprising the first material for modifying the waveguide function of the waveguide layer and in contact with the cladding layer, the further waveguide modifier layer located on a third axis perpendicular to the second axis and spaced from the first axis.
3 more elements
A waveguide structure comprising:
- a substrate;
- a waveguide layer on the substrate;
- a cladding layer in contact with a first side of the waveguide layer, the waveguide layer between the cladding layer and the substrate;
- a first waveguide modifier layer comprising a first material for modifying a waveguide function of the waveguide layer, the first waveguide modifier layer in contact with the cladding layer and having a width along a first axis less than a width, parallel to the first axis, of the cladding layer, the first axis perpendicular to a second axis corresponding with a light propagation direction within the waveguide layer;
- and
- a second material in contact with one or more portions of a side of the cladding layer overlapping the first side of the waveguide layer, the one or more portions not in contact with the first material.
3 more elements
A method of manufacturing a waveguide structure, the method comprising:
- depositing a first layer on a substrate to at least partly form a waveguide layer on the substrate;
- depositing a second layer material in contact with the first layer, to at least partly form a cladding layer in contact with the waveguide layer, the waveguide layer between the cladding layer and the substrate;
- and
- depositing a waveguide modifier layer material in contact with the second layer, to at least partly form a first waveguide modifier layer in contact with the cladding layer, the first waveguide modifier layer material for modifying a waveguide function of the waveguide layer, the first waveguide modifier layer having a width along a first axis less than a width, parallel to the first axis, of the cladding layer, the first axis perpendicular to a second axis corresponding with a light propagation direction within the waveguide layer;
- wherein the method comprises
- removing one or more portions of the waveguide modifier layer material to create respective one or more exposed portions of the second layer material;
- and
- depositing the second layer material onto the one or more exposed portions of the second layer material.
5 more elements
Dependencies are inferred from the claim text.