Detection device, detection apparatus and detection method
AssigneeSkyverse Technology Co., Ltd.
InventorsLu Chen, Le Yang, Song Zhang
Life of this patent
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AssigneeSkyverse Technology Co., Ltd.
InventorsLu Chen, Le Yang, Song Zhang
Estimating the term…
A detection device, a detection apparatus, and a detection method are provided. The detection device includes a detection assembly and a driving assembly. At least two rows of detection units are provided, and the detection units are arranged in a matrix along the first direction and the second direction. During detection, the driving assembly may drive one or both of the to-be-detected object and the detection assembly to move along at least one of the first direction and the second direction, so that the detection units scan different areas of the surface of the to-be-detected object, thereby realizing a scanning of the entire surface. That is, the scanning of the surface of the to-be-detected object is completed by using multiple detection units, which improves detection efficiency for the to-be-detected surface, and realizes a relatively high imaging quality.
A detection device, comprising:
A detection method, comprising:
Dependencies are inferred from the claim text.