Temperature control system
AssigneeCkd Corporation
InventorsNorio Kokubo, Shinichi Nitta
Life of this patent
Estimating the term…
Abstract
A temperature control system includes a first chiller, a first tank, a first tank bypass channel, a first mixing valve that adjusts a mixing ratio of a fluid flowing from the first tank into the first chiller to a fluid flowing from the first tank bypass channel into the first chiller, a second chiller, a second tank, a second tank bypass channel, a second mixing valve that adjusts a mixing ratio of a fluid flowing from the second tank into the second chiller to a fluid flowing from the second tank bypass channel into the second chiller, a first supply valve, a first return valve, a first on-off value, a second supply valve, a second return valve, a second on-off valve, and a controller that controls the valves.
Claims16
A temperature control system for controlling a temperature of a target object, the temperature control system comprising:
- a first chiller that adjusts a temperature of a fluid to a first temperature and pumps out the fluid;
- a first supply valve that controls a supply of the fluid from the first chiller to the target object;
- a first tank that holds the fluid that has returned from the target object to the first chiller up to a first fluid capacity and drains the fluid by an amount that exceeds the first fluid capacity;
- a first return valve that controls a return of the fluid from the target object to the first tank;
- a first target object bypass channel that allows the fluid to bypass the target object and return upstream of the first tank;
- a first on-off valve that opens and closes the first target object bypass channel;
- a first tank bypass channel that allows the fluid to bypass the first tank and return downstream of the first tank;
- a first mixing valve that adjusts a mixing ratio of the fluid flowing from the first tank into the first chiller to the fluid flowing from the first tank bypass channel into the first chiller;
- a second chiller that adjusts a temperature of the fluid to a second temperature that is lower than the first temperature and pumps out the fluid;
- a second supply valve that controls a supply of the fluid from the second chiller to the target object;
- a second tank that holds the fluid that has returned from the target object to the second chiller up to a second fluid capacity and drains the fluid by an amount that exceeds the second fluid capacity;
- a second return valve that controls a return of the fluid from the target object to the second tank;
- a second target object bypass channel that allows the fluid to bypass the target object and return upstream of the second tank;
- a second on-off valve that opens and closes the second target object bypass channel;
- a second tank bypass channel that allows the fluid to bypass the second tank and return downstream of the second tank;
- a second mixing valve that adjusts a mixing ratio of the fluid flowing from the second tank into the second chiller to the fluid flowing from the second tank bypass channel into the second chiller;
- and
- a controller that controls the first supply valve, the first return valve, the first on-off valve, the first mixing valve, the second supply valve, the second return valve, the second on-off valve, and the second mixing valve to control the temperature of the target object.
A temperature control system for controlling a temperature of a target object, the temperature control system comprising:
- a first chiller that adjusts a temperature of a fluid to a first temperature and pumps out the fluid;
- a first supply valve that controls a supply of the fluid from the first chiller to the target object;
- a tank that holds the fluid that has returned from the target object up to a fluid capacity and drains the fluid by an amount that exceeds the fluid capacity;
- a first return valve that controls a return of the fluid from the target object to the tank and the first chiller;
- a first target object bypass channel that allows the fluid to bypass the target object and return downstream of the first return valve;
- a first on-off valve that opens and closes the first target object bypass channel;
- a first tank bypass channel that allows the fluid to bypass the tank and return from downstream sides of the first return valve and the first target object bypass channel to a downstream side of the tank;
- a first tank return valve that controls a return of the fluid from the downstream sides of the first return valve and the first target object bypass channel to the tank;
- a first mixing valve that adjusts a mixing ratio of the fluid flowing from the tank into the first chiller to the fluid flowing from the first tank bypass channel into the first chiller;
- a second chiller that adjusts a temperature of the fluid to a second temperature that is lower than the first temperature and pumps out the fluid;
- a second supply valve that controls a supply of the fluid from the second chiller to the target object;
- a second return valve that controls a return of the fluid from the target object to the tank and the second chiller;
- a second target object bypass channel that allows the fluid to bypass the target object and return downstream of the second return valve;
- a second on-off valve that opens and closes the second target object bypass channel;
- a second tank bypass channel that allows the fluid to bypass the tank and return from downstream sides of the second return valve and the second target object bypass channel to a downstream side of the tank;
- a second tank return valve that controls a return of the fluid from the downstream sides of the second return valve and the second target object bypass channel to the tank;
- a second mixing valve that adjusts a mixing ratio of the fluid flowing from the tank into the second chiller to the fluid flowing from the second tank bypass channel into the second chiller;
- and
- a controller that controls the first supply valve, the first return valve, the first on-off valve, the first tank return valve, the first mixing valve, the second supply valve, the second return valve, the second on-off valve, the second tank return valve, and the second mixing valve to control the temperature of the target object.
Dependencies are inferred from the claim text.