Vacuum pump, vacuum pump controller, and remote controller
AssigneeEdwards Japan Limited
InventorsMasayuki Hashimoto, Yoshinobu Ohtachi, Yasushi Maejima, Tsutomu Takaada
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AssigneeEdwards Japan Limited
InventorsMasayuki Hashimoto, Yoshinobu Ohtachi, Yasushi Maejima, Tsutomu Takaada
Estimating the term…
A vacuum pump, a vacuum pump controller, and a remote controller are provided that can reduce the workload of users and field service engineers. A vacuum pump 10 includes a turbomolecular pump 100 that exhausts gas inside a semiconductor manufacturing apparatus X, and a controller 200 that performs control on the turbomolecular pump 100. The controller 200 includes a remote signal receiving means that receives a command signal from a remote controller 300, which remotely controls the turbomolecular pump 100, and changes a setting relating to an operating specification of the turbomolecular pump 100 on the basis of the command signal received by the remote signal receiving means.
A vacuum pump comprising:
Dependencies are inferred from the claim text.