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US 12,509,797 B2Granted
Method of fabricating metal-nitride vertically aligned nanocomposites
AssigneePurdue Research Foundation
InventorsHaiyan Wang, Xuejing Wang, Xinghang Zhang
Life of this patent
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Abstract
A method of the fabricating a metal-nitride vertically aligned nanocomposites is disclosed which includes applying a pulsed laser onto a composite target, the composite target including a two-phase metal-nitride plasmonic nanostructure, depositing adatoms of the composite target onto a substrate, and nucleating metal over the substrate and growing metal and nitride thereover until a predetermined size of vertically aligned metal nitride nanocomposite is achieved including metal nanorods embedded in nitride.
Claims5
A multilayer plasmonic nanocomposite structure, consisting of:
- a substrate;
- and
- alternating metal nitride layers ranging from four alternating nitride layers to eight alternating nitride layers disposed on the substrate, each layer consisting of a metal nanopillar of a predetermined length directly embedded in an alternating nitride, wherein each of the alternating metal nitride layers is selected from the group consisting of TiN, TaN, ZrN, GaN, AlN, HfN, and a combination thereof.
Dependencies are inferred from the claim text.