Bowl, substrate processing apparatus, and method of manufacturing

A substrate processing apparatus comprising:

• a process chamber;
• a processing container installed within the process chamber, the processing container having a processing space for processing a substrate;
• a support configured to support the substrate in the processing space;
• and
• a nozzle configured to discharge a liquid to the substrate,
• wherein the processing container includes a plurality of bowls disposed on a circumference of the support, and
• at least one of the plurality of bowls includes:
• a body portion having a cylindrical structure, the body portion having a recovery hole to which a recovery line is connected;
• a guide portion extending upwardly from an upper portion of the body portion and then extending in a lateral direction;
• and
• a connection frame installed across the inside of the body portion and the inside of the guide portion,
• wherein the connection frame includes a zigzag pattern with a plurality of first portions being vertically disposed and a plurality of second portions being horizontally disposed.

A method of manufacturing a bowl, the method comprising:

• preparing a mold formed such that a first space and a second space, respectively corresponding to a body portion and a guide portion connected to one end of the body portion, are connected to each other;
• disposing a connection frame across the first space and the second space;
• and
• injecting a molten material into the first space and the second space and integrally molding the body portion and the guide portion while fixing the body portion and the guide portion to the connection frame,
• wherein the connection frame includes a zigzag pattern with a plurality of first portions being vertically disposed and a plurality of second portions being horizontally disposed.