Split showerhead cooling plate
AssigneeLam Research Corporation
InventorsAndrew Borth, Sean M. Donnelly
Life of this patent
Estimating the term…
Abstract
A cooling assembly includes a first subassembly and a second subassembly. The first subassembly is coupled to a showerhead of a substrate processing system. The first subassembly including a plurality of passages proximate to and in thermal communication with the showerhead. The second subassembly is removably coupled to the first subassembly. The second subassembly includes a plurality of protrusions that align with the plurality of passages, respectively.
Claims20
A cooling assembly comprising:
- a first subassembly coupled to a showerhead of a substrate processing system, the first subassembly comprising a plurality of passages proximate to and in thermal communication with the showerhead;
- and
- a second subassembly removably coupled to the first subassembly, the second subassembly comprising a plurality of protrusions that align with the plurality of passages, respectively.
A cooling assembly coupled to a showerhead of a substrate processing system, the cooling assembly comprising:
- a first subassembly comprising:
- a first annular flange;
- a first cylindrical wall extending from the first annular flange to a first base portion enclosing a distal end of the first cylindrical wall, wherein the first base portion is attached to the showerhead of the substrate processing system;
- and
- a plurality of passages that are arranged on a first side of the first base portion facing the first annular flange and that extend radially from a first center region of the first base portion towards an outer diameter of the first base portion;
- and
- a second subassembly comprising:
- a second annular flange coupled to the first annular flange;
- a second cylindrical wall, that extends from the second annular flange to a second base portion and that encloses a distal end of the second cylindrical wall, wherein the first cylindrical wall surrounds the second cylindrical wall;
- and
- a plurality of protrusions that are arranged on a second side of the second base portion facing away from the second annular flange, that extend radially from a second center region of the second base portion towards an outer diameter of the second base portion, and that are aligned with the plurality of passages, respectively.
An assembly comprising:
- a first subassembly comprising:
- a first annular flange;
- a first cylindrical wall extending from the first annular flange to a first base portion enclosing a distal end of the first cylindrical wall;
- and
- a plurality of passages that are arranged on a first side of the first base portion facing the first annular flange and that extend radially from a first center region of the first base portion towards an outer diameter of the first base portion;
- and
- a second subassembly comprising:
- a second annular flange coupled to the first annular flange;
- a second cylindrical wall, that extends from the second annular flange to a second base portion and that encloses a distal end of the second cylindrical wall, wherein the first cylindrical wall surrounds the second cylindrical wall;
- and
- a plurality of protrusions that are arranged on a second side of the second base portion facing away from the second annular flange, that extend radially from a second center region of the second base portion towards an outer diameter of the second base portion, and that are aligned with the plurality of passages, respectively.
Dependencies are inferred from the claim text.