Deposition apparatus and deposition method
AssigneesInnolux Corporation, Carux Technology Pte. Ltd.
InventorsCheng-Wei Liu, Liang-Cheng Ma
Life of this patent
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Abstract
A deposition apparatus is provided, including a deposition chamber, at least one target, at least one substrate holder, and at least one adjustment plate. The at least one target, the at least one substrate holder, and the at least one adjustment plate are disposed in the deposition chamber, and the at least one adjustment plate is disposed between the at least one target and the at least one substrate holder. The at least one substrate holder includes a base portion, a first supporting portion, and a second supporting portion. The base portion has a flat surface. The first supporting portion is disposed on the flat surface and includes a curved surface. The second supporting portion is disposed on the flat surface and protrudes from it.
Claims20
A deposition apparatus, configured to deposit on at least one substrate, comprising:
- a deposition chamber;
- a first target, disposed in the deposition chamber;
- a second target, disposed in the deposition chamber;
- at least one substrate holder, disposed in the deposition chamber and disposed between the first target and the second target, wherein the at least one substrate holder comprises:
- a base portion, having a flat surface;
- a first supporting portion, disposed on the flat surface and having a curved surface;
- and
- a second supporting portion, disposed on the flat surface and protruding from the flat surface;
- and
- at least one adjustment plate, disposed in the deposition chamber and disposed between the first target or the second target and the at least one substrate holder, wherein the at least one adjustment plate comprises:
- a fixed portion, affixed to a wall of the deposition chamber;
- a frame portion, connected to the fixed portion;
- a plurality of fin portions, affixed to the frame portion;
- and
- a plurality of fixing members, wherein the frame portion comprises a plurality of first holes, and each of the fin portions comprises a second hole,
- wherein at least a portion of the first holes are arranged in a line that is substantially perpendicular to the wall,
- wherein each of the fixing members passes through the second hole of the corresponding fin portion and one of the first holes to affix the corresponding fin portion to the frame portion,
- wherein the first supporting portion and the second supporting portion are detachable from the base portion.
A deposition method, comprising:
- providing at least one substrate, wherein the at least one substrate has a flat surface section and a curved surface section;
- providing at least one substrate holder comprising a base portion, a first supporting portion, and a second supporting portion, wherein the first supporting portion and the second supporting portion are detachably disposed on the base portion;
- disposing the at least one substrate on the at least one substrate holder to form at least one substrate holder with a substrate, and forming an included angle between the flat surface section and the flat surface of the at least one substrate holder, wherein the included angle is greater than 0 degrees and less than or equal to 90 degrees;
- providing a deposition chamber, wherein a first target, a second target, a first adjustment plate, and a second adjustment plate are disposed in the deposition chamber, wherein the first adjustment plate or the second adjustment plate comprises:
- a fixed portion, affixed to a wall of the deposition chamber;
- a frame portion, connected to the fixed portion;
- a plurality of fin portions, affixed to the frame portion;
- and
- a plurality of fixing members, wherein the frame portion comprises a plurality of first holes, and each of the fin portions comprises a second hole, wherein at least a portion of the first holes are arranged in a line that is substantially perpendicular to the wall, wherein each of the fixing members passes through the second hole of the corresponding fin portion and one of the first holes to affix the corresponding fin portion to the frame portion;
- transferring the at least one substrate holder with a substrate to the deposition chamber and rotating the at least one substrate holder with a substrate to a position corresponding to the first target, wherein the first adjustment plate is disposed between the first target and the at least one substrate holder with a substrate, and the at least one substrate holder with a substrate is disposed between the first target and the second target;
- depositing a material of the first target on the at least one substrate;
- rotating the at least one substrate holder with a substrate to a position corresponding to the second target, wherein the second adjustment plate is disposed between the second target and the at least one substrate holder with a substrate;
- and
- depositing a material of the second target on the material of the first target that is on the at least one substrate.
Dependencies are inferred from the claim text.