Development of novel neutral layer and hydrophobic pinning mat materials for use in DSA with improved substrate compatibility

A random copolymer of structure (A) comprising,

• a carboxylic acid bearing repeat unit of structure (I), wherein Rm1 is H or a C-1 to C-4 alkyl, and n1 is the total number of this repeat unit;
• wherein this repeat unit ranges from about 1.0 mole % to about 5.0 mole % in said copolymer;
• a 4-vinylbenzocyclobutene derived repeat unit of structure (II), wherein Rm2 is H or a C-1 to C-4 alkyl, and n2 is the total number of this repeat unit;
• wherein this repeat unit ranges from about 5.0 mole % to about 35.0 mole % in said copolymer;
• a styrenic repeat unit of structure (III), wherein Rm3 is H or a C-1 to C-4 alkyl, Rsty is selected from a H, C-2 to C-8 linear alkyl, and a C-1 to C-4 alkyloxy and n3 is the total number of this repeat units;
• wherein this repeat unit ranges from about 25 mole % to about 94 mole % in said copolymer;
• an alkyl acrylate or alkyl 2-methylenealkanoate derived repeat unit of structure (IV), wherein Rm4 is H or a C-1 to C-4 alkyl, RI is a C-1 to C-8 alkyl and n4 is the total number of this repeat unit, wherein this repeat unit ranges from 0 mole % to about 64 mole % in said copolymer;
• a hydroxy functionalized alkyl acrylate or alkyl 2-methylenealkanoate derived repeat unit of structure (V), wherein Rm5 is H or a C-1 to C-4 alkyl, L1 is a C-2 to C-8 alkylene moiety and n5 is the total number of this repeat unit, wherein this repeat unit ranges from 0 mole % to about 3 mole % in said copolymer, and
• two end groups as shown in structure (A) one of which is H and the other is a methyl moiety substituted with Rr, Rr1 and Rr2, wherein Rr1, is a C-1 to C-8 alkyl, Rr2 is selected from a C-1 to C-8 alkyl, a C-1 to C-8 alkylene hydroxy moiety (-alkylene-OH), a C-1 to C-8 alkylenecarboxylic acid moiety (-alkylene-CO2H), or a benzylic alcohol comprising moiety of structure (B) wherein ni is an integer ranging from 0 to 5, nia is an integer from 1 to 5, nib is an integer from 1 to 5, and “*” designates the attached point of this moiety,
• Rr is a cyano moiety (—CN) or a carbonylalkyl moiety (—C(═O)—Ri), wherein Ri is a C-1 to C-8 alkyl or an aryl moiety;
• and further
• wherein the sum of the individual mole % of repeat units of structure (I), (II), (III), (IV) and (V), is either smaller than or equal to 100 mole % of the total repeat units present in said copolymer: