System and method for laser processing of workpieces in liquid

A method for material-ablative laser processing of workpieces in liquid, the method comprising the following steps:

• providing a workpiece within an interior of a process chamber;
• or underneath the process chamber,
• the process chamber comprising:
• a first side having a transparent process window for transmitting the laser radiation;
• a second side arranged opposite the first side, wherein the second side of the process chamber is open;
• a chamber wall surrounding an interior of the process chamber;
• filling the interior of the process chamber with a liquid;
• focusing a pulsed laser radiation onto a surface of the workpiece using a focusing unit;
• generating a relative movement of the focused laser radiation on the workpiece surface using a positioning unit;
• generating a liquid flow within the interior of the process chamber using a flow generator;
• adjusting a flow direction of the liquid flow depending on the relative direction of movement of the focused laser radiation on the surface of the workpiece.