Multilayer fluidic devices and methods for their fabrication
AssigneeIllumina, Inc.
InventorsJeffrey S. Fisher, John A. Moon, Bala Murali Venkatesan
Life of this patent
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Abstract
A fluidic device including an inorganic solid support attached to an organic solid support by a bonding layer, wherein the inorganic solid support has a rigid structure and wherein the bonding layer includes a material that absorbs radiation at a wavelength that is transmitted by the inorganic solid support or the organic solid support; and a channel formed by the inorganic solid support and the organic solid support, wherein the bonding layer that attaches the inorganic solid support to the organic solid support provides a seal against liquid flow. Methods for making fluidic devices, such as this, are also provided.
Claims11
A method for making a multilayer device, comprising:
- (a) providing an inorganic solid support and an organic solid support having a cutout region in a shape of a fluidic channel, wherein the inorganic solid support comprises a rigid structure and electrically conductive features present at a location of the inorganic solid support corresponding to a bottom surface of the fluidic channel and absent from a surface area of the inorganic solid support that is to bond to the organic solid support;
- (b) providing a radiation-absorbing material, wherein the radiation-absorbing material is not a metal;
- (c) contacting the inorganic solid support, the organic solid support, and the radiation-absorbing material in a configuration wherein a portion of the radiation-absorbing material is present at an interface between the surface area of the inorganic solid support and the organic solid support;
- and
- (d) applying compression at the interface and melting at least a portion of the organic solid support or the inorganic solid support by irradiating the portion of the radiation-absorbing material with radiation, then resolidifying the at least the portion of the organic solid support or the inorganic solid support to form a bonding layer between the inorganic solid support and the organic solid support, wherein the fluidic channel is defined at the cutout region and the organic solid support defines walls of the fluidic channel.
Dependencies are inferred from the claim text.