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US 12,507,018 B2Granted
Piezoelectric transducer
AssigneeInfineon Technologies AG
InventorsChristian Bretthauer, Gabriele Bosetti, Andreas Bogner
Life of this patent
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Abstract
A piezoelectric transducer comprises a deflectable structure having a first portion and a laterally adjoining second portion. The first portion has a piezoelectric layer and the second portion has an insulating material layer, and the second portion has a higher rigidity and a smaller mass per unit area than the first portion.
Claims20
A piezoelectric transducer comprising:
- a deflectable structure comprising a first portion and a second portion laterally directly adjoining the first portion,
- wherein the first portion has a piezoelectric layer and the second portion comprises a first insulating material layer, and
- wherein the second portion has a higher rigidity and a smaller mass per unit area than the first portion.
A piezoelectric transducer comprising:
- a deflectable cantilevered structure comprising:
- a piezoelectric layer having a first portion disposed on a carrier structure and a second portion adjoining the first portion, wherein the second portion is suspended away from the carrier structure, and
- an insulating material layer adjoining the second portion and extending to an end of the insulating material layer, wherein the insulating material layer is suspended away from the carrier structure and has a higher rigidity and a smaller mass per unit area than the second portion of the piezoelectric layer.
A piezoelectric transducer comprising:
- a deflectable structure comprising a first portion and a second portion laterally adjoining the first portion,
- wherein the first portion has a piezoelectric layer and the second portion comprises a first insulating material layer,
- wherein the second portion has a higher rigidity and a smaller mass per unit area than the first portion,
- wherein the first portion comprises:
- a layer stack having the piezoelectric layer for generating an electrical output signal, and
- a second insulating material layer, and
- wherein the second portion comprises only the first insulating material layer.
4 more elements
A piezoelectric transducer comprising:
- a deflectable structure comprising a first portion and a second portion laterally adjoining the first portion,
- wherein the first portion has a piezoelectric layer and the second portion comprises a first insulating material layer,
- wherein the second portion has a higher rigidity and a smaller mass per unit area than the first portion,
- wherein the first portion comprises:
- a layer stack having the piezoelectric layer for generating an electrical output signal, and
- a second insulating material layer, and
- wherein only the second portion comprises the first insulating material layer.
4 more elements
Dependencies are inferred from the claim text.