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US 12,506,025 B2Granted
Susceptor and method of manufacturing the same
AssigneeSemes Co., Ltd.
InventorsSo Hyung Jiong, Hyung Joon Kim, Jong Gun Lee
Life of this patent
Estimating the term…
Abstract
A method of manufacturing a susceptor includes preparing an electrostatic chuck (ESC) and a base plate, each including a gas channel, preparing a bush-filter assembly disposed between the gas channel in the ESC and the gas channel in the base plate, and coupling the ESC to the base plate in such a manner that a portion of the bush-filter assembly is accommodated in a first accommodation part formed in a surface of the ESC and that a remaining portion of the bush-filter assembly is at least partially accommodated in a second accommodation part formed in a surface of the base plate.
Claims20
A method of manufacturing a susceptor, the method comprising:
- preparing an electrostatic chuck (ESC) and a base plate, each comprising a gas channel;
- preparing a bush-filter assembly disposed between the gas channel in the ESC and the gas channel in the base plate;
- and
- coupling the ESC to the base plate in such a manner that a portion of the bush-filter assembly is accommodated in a first accommodation part formed in a surface of the ESC and that a remaining portion of the bush-filter assembly is at least partially accommodated in a second accommodation part formed in a surface of the base plate,
- wherein the preparing of the bush-filter assembly comprises:
- preparing a filter preform used to form a porous filter;
- preparing a bush preform comprising a filter accommodation part capable of accommodating the filter preform;
- and
- forming the bush-filter assembly which is an integrated sintered body in which a filter is sinter-bonded to a bush in the filter accommodation part, by accommodating the filter preform in the filter accommodation part of the bush preform and performing co-sintering.
6 more elements
A method of manufacturing a susceptor, the method comprising:
- preparing an electrostatic chuck (ESC)-bush-filter assembly in which a portion of a bush-filter assembly is accommodated in and coupled to a first accommodation part formed in a surface of an ESC;
- preparing a base plate comprising a second accommodation part formed in a surface;
- coupling the ESC to the base plate in such a manner that a remaining portion of the bush-filter assembly not accommodated in the first accommodation part formed in the ESC is at least partially accommodated in the second accommodation part formed in the base plate,
- wherein the preparing of the ESC-bush-filter assembly comprises:
- preparing an ESC preform comprising the first accommodation part formed in a surface;
- preparing a filter preform used to form a porous filter;
- preparing a bush preform comprising a filter accommodation part formed in a surface to accommodate the filter preform;
- and
- forming the ESC-bush-filter assembly which is a sintered body in which the ESC, a bush, and a filter are integrated with each other, by accommodating the bush preform in which the filter preform is accommodated in the filter accommodation part, in the first accommodation part and then performing co-sintering.
6 more elements
A susceptor comprising:
- an electrostatic chuck (ESC) for chucking a substrate by using electrostatic force, and comprising a first accommodation part formed in a surface opposite to a surface on which the substrate is chucked, and a gas channel connected to the first accommodation part;
- a base plate coupled to the surface of the ESC in which the first accommodation part is formed, and comprising a second accommodation part formed at a position corresponding to the first accommodation part of the ESC, and a gas channel connected to the second accommodation part;
- a bush-filter assembly disposed between the gas channel formed in the ESC and the gas channel formed in the base plate;
- and
- an adhesive layer disposed between the ESC and the base plate to couple the ESC to the base plate,
- wherein the bush-filter assembly comprises:
- a bush provided as a dense ceramic sintered body comprising a gas channel through which a gas flows, and a filter accommodation part formed at a side of the gas channel to accommodate a filter;
- and
- the filter provided as a porous ceramic sintered body through which a gas passes, and at least partially accommodated in the filter accommodation part so as to be sinter-bonded to and integrated with the bush,
- wherein the bush and the filter are made of ceramic materials with the same main component,
- wherein a portion of the bush-filter assembly is accommodated in the first accommodation part formed in the ESC so as to be coupled to the ESC, and a remaining portion of the bush-filter assembly is at least partially accommodated in and coupled to the second accommodation part formed in the base plate, and
- wherein an interface between the bush and the filter is formed by directly sinter-bonding the bush to the filter without using an adhesive layer made of a heterogeneous material.
9 more elements
Dependencies are inferred from the claim text.