Method and apparatus for automated defect detection

Abstract

In a method and apparatus for automated inspection, an image is acquired of an object under inspection and a difference image is generated showing the difference between the acquired image and a reference image of a defect-free object of the same type. Characteristics of the difference image, or detected isolated regions of the difference image, are passed to an automated defect classifier to classify defects in the object under inspection. The characteristics of the difference image may be pixels of the difference image or features determined therefrom. The features may be extracted using a neural network, for example. The automated defect classifier is trained using difference images and may be further trained, in operation, based on operator classifications and using simulated images of defects identified by an operator.

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